ZNO NANOROD GROWTH ON TI OR NI OHMIC LAYERS

摘要

PURPOSE: A method for manufacturing zinc oxide-based nano-rod is provided to bond the zinc oxide-based nano-rod and an ohmic layer without a foreign material layer between the zinc oxide-based nano-rod and the ohmic layer. CONSTITUTION: A thin electrode layer(20), which is based on silver or platinum, is deposited on a substrate(10). The substrate is based on sapphire or silicon. An ohmic layer(30), which is based on titanium, nickel, or aluminum, is deposited on the upper side of the electrode layer. The substrate with the electrode layer and the ohmic layer is moved to a growing chamber. A zinc oxide-based nano-rod(40) is grown.