发明名称 Block contact architectures for nanoscale channel transistors
摘要 A contact architecture for nanoscale channel devices having contact structures coupling to and extending between source or drain regions of a device having a plurality of parallel semiconductor bodies. The contact structures being able to contact parallel semiconductor bodies having sub-lithographic pitch.
申请公布号 GB2442379(B) 申请公布日期 2011.03.09
申请号 GB20070024762 申请日期 2006.06.29
申请人 INTEL CORPORATION 发明人 MARKO RADOSAVLJEVIC;AMLAN MAJUMDAR;BRIAN S DOYLE;JACK KAVALIEROS;MARK L DOCZY;JUSTIN BRASK;UDAY SHAH;SUMAN DATTA;ROBERT S CHAU
分类号 H01L29/786;H01L21/336;H01L29/417 主分类号 H01L29/786
代理机构 代理人
主权项
地址