发明名称 Detachable substrate with controlled mechanical strength and method of producing same
摘要 The invention relates to a method for production of a detachable substrate, comprising a method step for the production of an interface by means of fixing, using molecular adhesion, one face of a layer on one face of a substrate, in which, before fixing, a treatment stage for at least one of said faces is provided, rendering the mechanical hold at the interface at such a controlled level to be compatible with a subsequent detachment.
申请公布号 US7902038(B2) 申请公布日期 2011.03.08
申请号 US20040474984 申请日期 2004.06.10
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 ASPAR BERNARD;MORICEAU HUBERT;RAYSSAC OLIVIER;GHYSELEN BRUNO
分类号 H01L23/58;B81C99/00;H01L21/02;H01L21/762;H01L27/12 主分类号 H01L23/58
代理机构 代理人
主权项
地址