SUBSTRATE TREATING APPARATUS AND METHOD FOR TREATING SUBSTRATE USING THE SAME,申请号KR20080114645-传众专利搜索

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发明名称	SUBSTRATE TREATING APPARATUS AND METHOD FOR TREATING SUBSTRATE USING THE SAME
摘要
申请公布号	KR101019213(B1)	申请公布日期	2011.03.04
申请号	KR20080114645	申请日期	2008.11.18
申请人		发明人
分类号	H01L21/306;H01L21/683;H01L21/687	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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