SUBSTRATE PROCESSING APPARATUS AND ARRANGEMENT STRUCTURE OF THE SAME

摘要

PURPOSE: A substrate processing apparatus and arrangement structure are provided to enhance work efficiency by minimizing obstacles for moving workers by the opening of a door. CONSTITUTION: A first process station(20) is installed in a direction of a conveying path(10) for the import and export of a substrate. The first process station comprises a cooling part(22) for the cooling of the substrate and a heating unit(21). A second process station(30) is installed on the other side of the conveying path.