| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new zinc oxide based sintered compact target without using boron oxide (B<SB>2</SB>O<SB>3</SB>) powder. <P>SOLUTION: In the zinc oxide-type sintered compact target, zinc oxide (ZnO) powder and boron nitride (BN) powder are sintered. Preferably, the amount of nitrogen (N) of the sintered compact is set to be ≤0.01 mass%, and more preferably, ≤0.005 mass%. Further, the amount of boron (B) in the sintered compact is preferably 0.05-1 mass%. The target can be obtained by mixing, for example, zinc oxide powder with boron nitride powder, and sintering the mixture in the nitrogen atmosphere in the temperature range of 1,000-1,200°C. <P>COPYRIGHT: (C)2011,JPO&INPIT |
