HIGH-PRESSURE VESSEL FOR GROWING GROUP III NITRIDE CRYSTAL AND METHOD FOR GROWING GROUP III NITRIDE CRYSTAL USING HIGH-PRESSURE VESSEL AND GROUP III NITRIDE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method for growing group III nitride crystals using a cylindrical high-pressure vessel.

SOLUTION: The method for growing group III nitride crystals using a cylindrical high-pressure vessel includes: a step of loading group III-nitride seed crystals in a crystallization region and a group III-containing source in a nutrient region; a step of loading an alkali metal-containing mineralizer into the high-pressure vessel in a manner that the mineralizer has minimal exposure to oxygen and moisture; a step of sealing the high-pressure vessel; a step of evacuating the high-pressure vessel to pressure less than 1×10-5millibar; a step of illing the high-pressure vessel with ammonia; a step of ramping the temperature of the crystallization region above 500°C; a step of maintaining the temperature condition described above for sufficient time to grow crystals; a step of releasing ammonia to stop crystal growth; and a step of unsealing the high-pressure vessel.

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