| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrostatic type MEMS actuator having a program function. <P>SOLUTION: The programmable actuator includes a movable part 1 having a first drive electrode 3A; a second drive electrode 3B opposite to the first drive electrode 3A and having first and second parts 5a, 5b; a first drive circuit 6a for allowing the movable part 1 to operate a plurality of times, in a state where both the electrodes are not in electrical contact with each other, by generating a first potential difference between the first part 5a of the second drive electrode 3B and the first drive electrode 3A; and a second drive circuit 6b for fixing the movable part 1, in a state where both the electrodes are in electrical contact with each other, by generating a second potential difference between a second part 5b of the second drive electrode 3B and the first drive electrode 3A. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
