发明名称 |
MANUFACTURING METHOD OF PLANAR OPTICAL WAVEGUIDE DEVICE WITH GRATING STRUCTURE |
摘要 |
A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.
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申请公布号 |
US2011049735(A1) |
申请公布日期 |
2011.03.03 |
申请号 |
US20090547115 |
申请日期 |
2009.08.25 |
申请人 |
FUJIKURA LTD.;AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH |
发明人 |
SAKUMA KEN;OGAWA KENSUKE;GOI KAZUHIRO;TAN YONG TSONG;GUAN NING;YU MINGBIN;TEO HWEE GEE;LO GUO-QIANG |
分类号 |
G02B6/10 |
主分类号 |
G02B6/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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