| 摘要 |
PROBLEM TO BE SOLVED: To heighten surface rigidity of a prober frame, to reduce strain, and to thereby uniformize a contact pressure between each probe pin and an electrode of a TFT panel substrate. SOLUTION: In an outer frame, a layer structure is constituted by using a plate material of an aluminum alloy as a base material, and by connecting in the layered state, at least either plate material of a plate material of a stainless alloy and a plate material of a fiber reinforced resin to the plate material of the aluminum alloy. A bending rigidity of the outer frame is improved by forming the layer structure. COPYRIGHT: (C)2011,JPO&INPIT
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