发明名称 Mikromechanischer Coriolis-Drehratensensor
摘要 The micro-mechanical coriolis rotary speed sensor has components around measuring axes in three orthogonal spatial directions. A substrate (7), a detection mass (3) and two drive masses (4a,4b,4c,4d) are provided, where the drive masses are driven relative to the substrate in a primary motion. The detection mass is coupled with the drive masses. An independent claim is included for a method for detecting rotary speed in three mutually orthogonal spatial directions.
申请公布号 DE502008002421(D1) 申请公布日期 2011.03.03
申请号 DE20085002421T 申请日期 2008.11.11
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 MERZ, PETER;WEISS, MANFRED
分类号 G01C19/56 主分类号 G01C19/56
代理机构 代理人
主权项
地址