| 摘要 |
PROBLEM TO BE SOLVED: To enhance the SN ratio of a detection signal from damage or the like present in an object, in an ultrasonic inspection system. SOLUTION: The ultrasonic inspection system 10 is constituted of a laser drive device 12 for irradiating the object 50 with a laser beam to excite ultrasonic vibration in the object 50, a galvano scanner 14 for causing the laser beam to scan the surface of the object 50, ultrasonic probes 16 and 18 being a plurality of the receiving means arranged to the object 50, a control unit 30 or the like. The control unit 30 includes an individual imaging processing part 32 for imaging the ultrasonic vibration distribution in the object on a two-dimensional surface at every receiving means on the basis of the detection signal received by each of the receiving means corresponding to the scanning timing of the laser beam, and an image-enhancing processing part 34 for performing enhancement processing subjecting a plurality of image data at the same position to sum operation or integral operation with respect to a plurality of individual imaging data to obtain enhancement processing data at the position. COPYRIGHT: (C)2011,JPO&INPIT
|
