| 发明名称 |
SUBSTRATE BONDING SYSTEM AND PORTABLE CHAMBER THEREFOR |
| 摘要 |
<p>PURPOSE: A substrate bonding system and a portable chamber therefore are provided to increase the production efficiency of a bonding process by consecutively performing bonding process through conveyor transfer device. CONSTITUTION: A transfer chamber(120) accommodates a pair of substrates which are arranged. A conveyor transport unit(130) consecutively transfers a movable chamber. A conveyor transport device is arranged in order to pass through a heating apparatus. A vacuum generator(150) making the inside of the movable chamber vacuum is installed in the conveyor transport device. A heating device(140) performs heating process by bonding the pair of substrate with the movable chamber.</p> |
| 申请公布号 |
KR101017361(B1) |
申请公布日期 |
2011.02.28 |
| 申请号 |
KR20100011642 |
申请日期 |
2010.02.08 |
| 申请人 |
LTRIN. CO., LTD. |
发明人 |
CHA, YONG WON;LEE, JONG SANG;PARK, GUN WOO;JUNG, SEUNG HEE |
| 分类号 |
H01L21/00;H01L21/20 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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