RESIST LIQUID SUPPLY APPARATUS, RESIST LIQUID SUPPLY METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

摘要

PURPOSE: An apparatus for supplying resist liquid is provided to reduce default of a resist pattern and foreign materials such as resist gel. CONSTITUTION: An apparatus(200) for supplying resist liquid comprises: a resist liquid supply source(201) which flows under resist liquid; a supply tube(202) for supplying the resist liquid with a coating nozzle(142); a filter(207) for removing foreign materials from the resist liquid; and a heater(205) for heating the resist liquid inside the supply tube at certain temperature higher than room temperature. The resist liquid contains fluorine resins.