| 发明名称 |
WATER-REACTIVE AL COMPOSITE MATERIAL, WATER-REACTIVE AL FILM, PROCESS FOR THE PRODUCTION OF THE AL FILM, AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER |
| 摘要 |
Herein disclosed are a water-reactive Al composite material which comprises 4NAI or 5NAI containing added In in an amount ranging from 2 to 5% by mass on the basis of the amount of Al; a water-reactive Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this water-reactive Al film on the surface thereof.
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| 申请公布号 |
US2011041759(A1) |
申请公布日期 |
2011.02.24 |
| 申请号 |
US20090989971 |
申请日期 |
2009.04.27 |
| 申请人 |
ULVAC, INC. |
发明人 |
KADOWAKI YUTAKA;SAITOU TOMOKO;LIM KENG WENG;MUSHIAKE KATSUHIKO |
| 分类号 |
B05C21/00;B32B15/00;C21D1/00;C22C21/00 |
主分类号 |
B05C21/00 |
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