OBJECT MOVING APPARATUS, OBJECT PROCESSING APPARATUS, EXPOSURE APPARATUS, OBJECT INSPECTING APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

A substrate (P) is held by adsorption by a substrate holding frame (60) that is formed into a frame shape and is lightweight, and the substrate holding frame (60) is driven along a horizontal plane by a drive unit (70) that includes a linear motor. Below the substrate holding frame (60), a plurality of air levitation units (50) are placed that support by levitation the substrate (P) in a noncontact manner such that the substrate (P) is substantially horizontal, by jetting air to the lower surface of the substrate (P). Since the plurality of air levitation units (50) cover a movement range of the substrate holding frame (60), the drive unit (70) can guide the substrate holding frame (60) (substrate (P)) along the horizontal plane at high speed and with high precision.