| 摘要 |
PROBLEM TO BE SOLVED: To reduce manufacturing cost of a mask ROM by preventing an increase in area of a memory cell array region of the mask ROM. SOLUTION: A contact type mask ROM including the memory cell array region 10 and a peripheral circuit region, includes a plurality of vias 104A to 104R, and 102R to 102H connecting predetermined wiring layers to each other, wherein the via 102A to 102H of the memory cell array region used for programming, and the vias 104A to 104R in the peripheral circuit region are different in diameter. COPYRIGHT: (C)2011,JPO&INPIT
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