| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement device capable of shortening the necessary time for the measurement while securing prescribed accuracy. SOLUTION: The measurement device 10 measures a surface shape of an object to be measured on the basis of acquisition data of line reflected light Rl from an imaging element 17. The measurement device includes: a plurality of imaging optical systems (33, 34) imaging the line reflected light Rl onto a light receiving surface of the imaging element 17; and a light beam splitting mechanism 33 splitting the line reflected light Rl to guide it to each imaging optical system so that the shape of the line light L on the object (16) to be measured is obtained at measurement positions different from each other as viewed from the extension direction of the line light L. In the imaging element 17, a plurality of segments are set on the light receiving surface, each segment is partitioned into a plurality of regions, and one or more regions in each segment are set as a light receiving region. The respective imaging optical systems image the split line reflected light Rl onto the light receiving regions of the segments different from each other in the light receiving surface of the imaging element 17. COPYRIGHT: (C)2011,JPO&INPIT
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