| 摘要 |
Disclosed is a laser machining method whereby a workpiece is reliably cut and the strength of a chip obtained is enhanced. Laser light (L) is irradiated on a workpiece (1) to form modified regions (17, 27, 37, 47) which extend along an intended cutting line (5) and are arranged in the thickness direction. The modified region (17) is formed so that modified region forming parts (17a) and modified region non-forming parts (17b) are alternately arranged along the intended cutting line, and the modified region (47) is formed so that modified region forming parts (47a) and modified region non-forming parts (47b) are alternately arranged along the intended cutting line. Thus, it is possible to prevent the strength of a rear surface (21) side and a front surface (3) side of a chip obtained by cutting from being reduced due to the formed modified regions (7). As the modified regions (27, 37) located between the modified regions (17, 47) are formed continuously from one end of the intended cutting line (5) to the other end thereof, the cutting property of the workpiece (1) can be reliably obtained. |
