| 摘要 |
PROBLEM TO BE SOLVED: To provide a maintenance-free and clean evacuation pump capable of reducing the size with a simple constitution. SOLUTION: This evacuation pump 10 includes a rotor 13 having a shaft 11 arranged in the center and a moving blade 12 installed on the periphery of the shaft 11, a stator 16 having a casing 14 for surrounding the rotor 13 and a stator blade 15 arranged inside the casing 14, and a bearing for rotatably supporting the shaft 11. Superconducting magnetic bearings 17 and 18 are used for the bearing, and a refrigerant used for the superconducting magnetic bearings 17 and 18 is used for a refrigerant for cooling the stator 16. COPYRIGHT: (C)2011,JPO&INPIT |
