发明名称 PRODUCTION METHOD FOR PRECURSOR SOLUTION OF STRONTIUM TITANATE, STRONTIUM TITANATE THIN FILM, METHOD OF PRODUCING STRONTIUM TITANATE THIN FILM AND THERMOELECTRIC CONVERSION ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a production method for a precursor solution of strontium titanate which can form a strontium titanate thin film with a fine crystal particle structure, a strontium titanate thin film formed by using the precursor solution prepared by the method, a production method for a strontium titanate thin film to produce the strontium titanate film, and a thermoelectric conversion element using the strontium titanate thin film. <P>SOLUTION: The production method for the precursor solution of strontium titanate uses strontium isopropoxide, titanium(IV)isopropoxide, 2-methoxyethanol under inert atmosphere in the absence of water to produce the precursor solution of strontium titanate. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011037661(A) 申请公布日期 2011.02.24
申请号 JP20090185452 申请日期 2009.08.10
申请人 FUJITSU LTD 发明人 ISHII MASATOSHI
分类号 C01G23/00;H01L35/22;H01L35/34 主分类号 C01G23/00
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