摘要 |
<P>PROBLEM TO BE SOLVED: To provide a production method for a precursor solution of strontium titanate which can form a strontium titanate thin film with a fine crystal particle structure, a strontium titanate thin film formed by using the precursor solution prepared by the method, a production method for a strontium titanate thin film to produce the strontium titanate film, and a thermoelectric conversion element using the strontium titanate thin film. <P>SOLUTION: The production method for the precursor solution of strontium titanate uses strontium isopropoxide, titanium(IV)isopropoxide, 2-methoxyethanol under inert atmosphere in the absence of water to produce the precursor solution of strontium titanate. <P>COPYRIGHT: (C)2011,JPO&INPIT |