METHOD OF EVALUATING OPTICAL CHARACTERIZATION

摘要

PROBLEM TO BE SOLVED: To provide a method for nondestructive optical characteristic evaluation.

SOLUTION: This method 100 includes a stage 101 for determining geometrical parameters of one or more geometrical patterns; and a stage 102 for acquiring in a scatterometrical way an experimental optical reaction 105 of a diffraction structure positioned in a chamber having a prescribed pressure, which is a stage 102 generating condensation of an adsorbable gaseous material in at least one portion of an open air hole of a pattern of the diffraction structure, by existence of the adsorbable gaseous material in the chamber. The method further includes a stage 106 for determining a theoretical optical reaction 107 of the diffraction structure, by adjusting an optical refractive index of the material in each domain of one or more geometrical patterns. The adsorbable gaseous material is condensed, and the difference between the experimental optical reaction 105 and the theoretical reaction 107 becomes below a prescribed threshold.

COPYRIGHT: (C)2011,JPO&INPIT