发明名称 |
Method and device for optical inspection of a surface on an object |
摘要 |
The device (10) has a pattern generator (12) formed for producing variable light dark samples. A camera (32) is provided for recording the pictures, which show only a section of the surface (28). An intensity process (22) is arranged with different phase positions. An independent claim is also included for a method for optical examining of a surface at an article. |
申请公布号 |
EP2287593(A1) |
申请公布日期 |
2011.02.23 |
申请号 |
EP20100008279 |
申请日期 |
2010.08.09 |
申请人 |
CARL ZEISS OIM GMBH |
发明人 |
KNUPFER, KLAUS-GEORG;BECK, ROLF;HUSS, VOLKER |
分类号 |
G01B11/25;G01N21/88 |
主分类号 |
G01B11/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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