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发明名称
摘要
申请公布号	JP4637081(B2)	申请公布日期	2011.02.23
申请号	JP20060304358	申请日期	2006.11.09
申请人		发明人
分类号	H01L21/677;H01L21/28;H01L21/285;H01L21/288	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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