发明名称 OPTICAL POSITION MEASURING DEVICE
摘要 A measuring device for detecting a relative position, the measuring device including a measurement graduation movable in at least one measurement direction and a scanning unit for determining a relative position of the measurement graduation with respect to the scanning unit. The scanning unit includes a light source, a scanning grating disposed on a first side of a transparent carrier element that is positioned in a scanning beam path and a detector arrangement. The scanning unit further includes an attenuation structure that adjusts a light intensity on the detector arrangement in a defined manner, wherein either 1) the attenuation structure is disposed on a second side, opposite the first side, of the transparent carrier element or 2) the attenuation structure has a permeability that varies as a function of location at least along one direction so that a light intensity which is uniform at least in that one direction results on the detector arrangement.
申请公布号 EP2286185(A1) 申请公布日期 2011.02.23
申请号 EP20090753712 申请日期 2009.03.31
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 BENNER, ULRICH
分类号 G01D5/38;G01D5/347 主分类号 G01D5/38
代理机构 代理人
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