发明名称 Attenuator system for beam modulation
摘要 An attenuator system for attenuating a radiation beam, including a first attenuating element placed in a path of a radiation beam for attenuation thereof, a second attenuating element placed distal to the first attenuating element for further attenuation of the radiation beam, a first positioner operatively connected to the first attenuating element, which moves the first attenuating element along a first direction, a first processor operatively connected to the first positioner for controlling motion of the first attenuating element, a second positioner operatively connected to the second attenuating element, which moves the second attenuating element along a second direction, and a second processor operatively connected to the second positioner for controlling motion of the second attenuating element, wherein a two-dimensional attenuation distribution of the first attenuating element varies linearly with respect to at least one coordinate.
申请公布号 US7893412(B2) 申请公布日期 2011.02.22
申请号 US20080324868 申请日期 2008.11.27
申请人 EIN-GAL MOSHE 发明人 EIN-GAL MOSHE
分类号 G21K1/04 主分类号 G21K1/04
代理机构 代理人
主权项
地址