发明名称 |
WAFER PROBE TEST AND INSPECTION SYSTEM |
摘要 |
An apparatus for electrically testing a semiconductor device is herein disclosed. The apparatus includes carriers for a semiconductor device and a probe card (52) that are adapted for complementary registration with one another. The coupled carriers may be stacked or used in another high-density arrangement during electrical test or burn-in to improve test cell utilization.
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申请公布号 |
US2011037492(A1) |
申请公布日期 |
2011.02.17 |
申请号 |
US20080600153 |
申请日期 |
2008.05.15 |
申请人 |
RUDOLPH TECHNOLOGIES, INC. |
发明人 |
SEUBERT RONALD C.;HILTON GEOFFREY;SANDBACH REX H. |
分类号 |
G01R31/00;G01R31/26 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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