发明名称 WAFER PROBE TEST AND INSPECTION SYSTEM
摘要 An apparatus for electrically testing a semiconductor device is herein disclosed. The apparatus includes carriers for a semiconductor device and a probe card (52) that are adapted for complementary registration with one another. The coupled carriers may be stacked or used in another high-density arrangement during electrical test or burn-in to improve test cell utilization.
申请公布号 US2011037492(A1) 申请公布日期 2011.02.17
申请号 US20080600153 申请日期 2008.05.15
申请人 RUDOLPH TECHNOLOGIES, INC. 发明人 SEUBERT RONALD C.;HILTON GEOFFREY;SANDBACH REX H.
分类号 G01R31/00;G01R31/26 主分类号 G01R31/00
代理机构 代理人
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