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发明名称
Heissrandring mit geneigter oberer Oberfläche
摘要
申请公布号
DE202010014805(U1)
申请公布日期
2011.02.17
申请号
DE201020014805U
申请日期
2010.10.27
申请人
LAM RESEARCH CORPORATION (DELAWARE CORPORATION)
发明人
分类号
H01J37/317;H05H1/00
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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