| 摘要 |
PURPOSE: A port unit of an ion pump and an ion pump including the same is provided so that after a feed through has been mounted, a part of a housing, which is exposed to external environment before the mounting of the feed through, and the inner space of the feed through can be formed to be in a vacuum state. CONSTITUTION: A port unit of an ion pump comprises a housing(110), an electricity feeding rod(42), an insulating pipe(150) and a bonding pipe(130). The housing comprises a cavity, a part attached to the vacuum container of the ion pump and another part coupling to one end of a feed through. The electricity feeding rod is located on the cavity of the housing and transfers the electric energy, which has been transferred from the feed through, to an anode cell. The insulating pipe comprises a hollow structure, which makes tight contact with the outer circumferential surface of the electricity feeding rod. The insulating pipe insulates the electricity feeding rod from the housing. The bonding pipe comprises an inner circumferential surface, which is attached to the outer circumferential surface of the insulating pipe, and an outer circumferential surface, which is attached to the inner circumferential surface of the housing.
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