发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To keep flatness of a memory cell array having a lamination structure. <P>SOLUTION: This semiconductor memory device includes: a plurality of first selection line groups WL laminated in a vertical direction, and each including a plurality of first selection lines extending in a first direction; a plurality of second selection line groups BL alternately laminated with the first selection line groups WL, and each including a plurality of second selection lines extending in a second direction that intersects with the first direction; and memory cells MC arranged between the first selection lines and the second selection lines. Even-numbered layers and odd-numbered layers out of the plurality of first selection line groups WL are arranged to be shifted in the second direction. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011035202(A) 申请公布日期 2011.02.17
申请号 JP20090180875 申请日期 2009.08.03
申请人 TOSHIBA CORP 发明人 OZAWA SUSUMU
分类号 H01L27/10;G11C13/00 主分类号 H01L27/10
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