| 摘要 |
PROBLEM TO BE SOLVED: To suppress a decrease in exhaust efficiency of a processing chamber even when an interval between an electrode and a back member is made narrow. SOLUTION: A high-frequency electrode 320 is disposed in the processing chamber 100, and a high frequency is applied to it. The top surface of the high-frequency electrode 320 faces a workpiece 10. The back member 210 is provided apart from a backside of the high-frequency electrode 320 so as to cover the backside. A space between the back member 210 and high-frequency electrode 320 serves as the exhaust route of the processing chamber 100. The high-frequency electrode 320 is formed of: a plate-like surface member 322 forming the top surface of the high-frequency electrode 320; and a housing 324 fitted to the backside of the surface member 322. The surface member 322 is made of metal such as stainless steel, for example. The housing 324 is in a box shape, and made of a porous plate, for example, a punching metal obtained by forming many holes in a metal plate such as stainless steel sheet by punching. COPYRIGHT: (C)2011,JPO&INPIT |
