| 摘要 |
<p>PURPOSE: A cleaning composition is provided to ensure removal ability for organic materials and particle on the surface of glass of a flat panel display substrate and easy handling due to a large amount of deionized water. CONSTITUTION: A cleaning composition for a flat panel display substrate comprises: an oxyamine compound represented by chemical formula 1; an additive containing single or two or more kinds selected from the group consisting of azole-based compounds, alkanol amine salt, and reducing agents; and water. In the chemical formula 1, R1 is C1~3 linear or chain type hydroxyalkyl group and C1~3 linear or chain type thiolalkyl group; R2 and R3 are hydrogen, C1~4 alkyl group, C1~4 hydroxy alkyl group, C6~10 aryl group, C1~4 alkoxyalkyl group, and C1~4 alkoxyalkanol group; and n is a natural number of 1-4.</p> |
