| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for removing deposit by which, in laser cleaning, deposit can be removed at high precision in a short period of time while energy consumption is suppressed. <P>SOLUTION: An operator uses a periodic structure forming apparatus 100 to form a periodic structure composed of a plurality of fine rugged shapes on the surface of an object WK to be treated (hereinafter described as object WK). The periodic structure forming apparatus 100 forms a periodic structure on the surface of the object WK by irradiating the surface of the object WK with femtosecond laser beam<SB>100</SB>from a laser beam source 101 while supporting the object WK by a stage device 106 displaceably. Whereas the operator cleans the object WK with deposit deposited thereon using a cleaning device 200. The cleaning device 200 scans laser beam L<SB>200</SB>emitted from a laser beam source 201 and condensed on the object WK on the object WK by a galvano mirror 203, thus deposit deposited on the surface of the object WK are peeled and removed. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
