APPARATUS FOR THIN LAYER DEPOSITION

摘要

PURPOSE: A thin layer deposition apparatus is provided to facilitate the adjustment of gap between a nozzle and a substrate and to improve production yield and deposition efficiency. CONSTITUTION: A thin layer deposition apparatus(100) comprises an evaporation source(110), a first nozzle(120), a second nozzle(150), a blocking wall assembly(130), and an alignment control member. The first nozzle is placed on one side of the evaporation source and comprises multiple first silts formed along a first direction. The second nozzle is faced to the evaporation source and comprises multiple second slits formed along the first direction. The blocking wall assembly has multiple blocking walls placed arranged along the first direction. The align controller controls alignment between the substrate and the second nozzle.