| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method and a cleaning device which use a cleaning agent such as a hydrocarbon based solvent, the method and device achieving energy saving while maintaining high work efficiency. SOLUTION: The cleaning device 10 includes: a first cleaning tank 11; a second cleaning tank 12; an oil concentration monitoring part 13; a storage tank 14; a distillation regeneration unit 15; and a distillation regeneration control part not shown in the figure. An object to be cleaned is subjected to ultrasonic cleaning in the first cleaning tank, and is subjected to rinse cleaning in the second cleaning tank. Meanwhile a cleaning agent contaminated by oil stuck to the object to be cleaned is exhausted from the first cleaning tank 11 to a circulation passage 161 and a first recovery passage 162, and the concentration of the oil contained in the contaminated cleaning agent is measured by an oil concentration monitoring part 13 provided at the middle of the circulation passage 161. The measured value is fed to the distillation regeneration unit control part, the distilled amount of the contaminated cleaning agent and the value of the electric power required for the distillation of the contaminated cleaning agent are calculated, and the contaminated cleaning agent in the calculated distilled amount and the electric power are fed to a distillation column 151. COPYRIGHT: (C)2011,JPO&INPIT
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