SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE SUPPORTING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS AND STORAGE MEDIUM,申请号KR20080079220-传众专利搜索

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发明名称	SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE SUPPORTING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS AND STORAGE MEDIUM
摘要
申请公布号	KR101015190(B1)	申请公布日期	2011.02.17
申请号	KR20080079220	申请日期	2008.08.13
申请人		发明人
分类号	H01L21/02;H01L21/677	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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