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发明名称
CONTROL OF PARTICLES ON SEMICONDUCTOR WAFERS WHEN IMPLANTING BORON HYDRIDES
摘要
申请公布号
EP2283509(A1)
申请公布日期
2011.02.16
申请号
EP20090755271
申请日期
2009.05.29
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
RAY, ANDY
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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