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发明名称
ELECTRON BEAM APPARATUS
摘要
申请公布号
EP1235251(B1)
申请公布日期
2011.02.16
申请号
EP19990952806
申请日期
1999.10.29
申请人
HITACHI, LTD.
发明人
SATO, MITSUGU;TODOKORO, HIDEO
分类号
H01J37/147;G01N23/00;G01Q30/02;H01J37/05;H01J37/153;H01J37/28
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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