| 摘要 |
PURPOSE: A coating device is provided to easily form an ultrafine multi-layered coating material by rapidly rotating a jig and to minimize a space required for a coating work. CONSTITUTION: A coating device comprises a vacuum chamber(10), a jig(20), and coating sources(30). The vacuum chamber has an inner space(10a). The jig is shaft-rotated inside the vacuum chamber. An object is mounted on the surface of the jig. The coating sources are installed in the vacuum chamber and supply coating materials to the object.
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