| 摘要 |
PURPOSE:To raise an operability and also an accuracy by subtracting an output signal of a background component from an output signal of an image sensor means, and converting it to an inclination of an object to be inspected. CONSTITUTION:A time series measuring signal outputted from an image sensor 21 is amplified by a pre-amplifier 25, and thereafter, sample-held by a sample holding circuit 26, and an output whose high frequency component has been cut by an LPF27 is inputted to a differential circuit 28 and a sample holding circuit 29. Subsequently, a voltage which is equal to 1/2 of a peak level of a signal of one scanning before a signal inputted to a (-) input terminal is inputted to the other input terminal of a comparator 32, and an outputted square wave corresponds to a peak position. Next, a pulse selected by a data selector 33 and an output signal of an FF34 are inputted to an AND circuit 36, and the number of pulses is counted by a counter 37. This counting value, a read pulse and a correcting value are inputted to an operating circuit 38, and displayed on a digital indicator 41. |
