发明名称 Chip bonding tool and related apparatus and method
摘要 A chip bonding tool, related apparatus and a method thereof. The chip bonding tool includes a pressing block, through which a laser beam passes, for pressing a semiconductor chip; and a projection disposed under the pressing block, through which the laser beam passes, onto which the semiconductor chip is sucked, which spaces the pressing block from the semiconductor chip.
申请公布号 US7886796(B2) 申请公布日期 2011.02.15
申请号 US20070807794 申请日期 2007.05.30
申请人 SAMSUNG TECHWIN CO., LTD. 发明人 OK JI-TAE
分类号 H01L21/02;B23K26/20;H01L21/67 主分类号 H01L21/02
代理机构 代理人
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