| 摘要 |
<p>PURPOSE: An overlay key pattern structure and a method of controlling overlay matching are provided to improve the productivity and reliability of a semiconductor chip by matching two layers formed at different times. CONSTITUTION: An overlay key(100) is formed within the scribe line(110) of a wafer. A first overlay key is formed with first bars(112,114,116,118). A second overlay key(122,124,126,128) is spaced from the first overlay key. The second overlay key is formed in the first overlay key of a rectangle bar. Third overlay keys(132,134,136,138) are spaced from the first overlay key and the second overlay key.</p> |
