| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrolysis-laser combined machining method and a device for forming a pattern hole of a high aspect ratio without generating a heat-affected layer and molten coagulation by laser irradiation. <P>SOLUTION: In this method and device, insulating films are formed on the whole of an outer surface of a metal workpiece, the insulating films are removed in a portion where the pattern hole is formed by irradiating the insulating films with laser, metal is removed by electrochemical machining to form the pattern hole, passive films are generated in the whole of the pattern hole while the electrochemical machining is continued, the insulating films at a bottom surface of the pattern hole are removed by laser irradiation when the passive films start to act as the insulating films, metal is removed from the portion where the insulating films at the bottom surface of the pattern hole are removed by electrochemical machining. Thus, the electrochemical machining and the laser irradiation are repeated till the pattern hole is penetrated or reaches a prescribed depth. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
