| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor test apparatus which can reduce the measurement time of a current test on a semiconductor device, and semiconductor test method. <P>SOLUTION: The semiconductor test apparatus 1 includes a current detection circuit 11, a current drawing circuit 12, and a determination apparatus 13. The current drawing circuit 12 is connected to the semiconductor device 10 and draws a branched current, which branches off from a measured current, from the measured current passed through the semiconductor device 10 to which a predetermined voltage was applied. The current detection circuit 11 is connected to the semiconductor device 10 and detects a detected current which is obtained by subtracting the branched current passed through the current drawing circuit 12 from the measured current passed through the semiconductor device 10. The determination apparatus 13 performs quality determination on the semiconductor device 10 on the basis of the detected current. <P>COPYRIGHT: (C)2011,JPO&INPIT |
