| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum evacuation method and a vacuum evacuation device, removing discharge gas discharged from a sliding part which is considered to be a discharge gas generation site with high efficiency and a simple structure. SOLUTION: In a vacuum device equipped with a moving device in a vacuum chamber, the vacuum device is provided with a sliding mechanism sliding in accordance with a move of the moving device, a slid part of the sliding mechanism is to be a getter surface containing an active metal material, and the sliding part is to be a friction member frictioning the getter surface. In the vacuum evacuation method, the getter surface is newly generated by frictioning the active metal material accompanying the move of the moving mechanism. COPYRIGHT: (C)2011,JPO&INPIT
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