| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a magnetic sensor manufacturing method and a magnetic sensor capable of reducing variations in offset voltage even if heat is added to the sensor at least in a packaging process at manufacture. <P>SOLUTION: Films of magnetic resistors 10-40 assembled in a bridge shape are deposited in an insulating layer of a substrate surface of a magnetic sensor. After the film deposition of the magnetic resistors 10-40, a protective film is deposited in its surface. After the film deposition of the protective film, its substrate component, that is a substrate module, is annealed. After this annealing, resistance values of the magnetic resistors 10-40 are adjusted by cutting a coarsely adjusted parts 8 of the magnetic resistors 10-40 by laser trimming. The substrate module is finally packaged. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
