| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inkjet head which makes the bonding surface of a recording element substrate with a substrate support member minute more than the one formed by a conventional technique without decreasing a sealing reliability, and a manufacturing method. <P>SOLUTION: A projection 8, which is formed in the recording element substrate 2 and bonds with the substrate support member 13, is formed so as to have the same quality as the recording element substrate 2 by continuously etching the recording element substrate 2 with a metal layer 9 as an etching mask. Accordingly, since the projection 8 is formed in the state where the sufficient flatness for assuring the metal welding between the metal layers 9 and 14 is maintained, the inkjet head can be manufactured inexpensively without thickening the bump of the metal layer 9. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
