| 摘要 |
PROBLEM TO BE SOLVED: To more strictly prevent transmission of moisture from an opening for a fuse to outside a guard ring. SOLUTION: A silicon fuse composed of a first silicon film pattern and a silicon wiring pattern 7 are formed on a base insulating film 3. A silicon guard ring 11 composed of a second silicon film pattern formed separately from the first silicon film pattern is formed in an annular shape on the base insulating film while partially striding across the silicon wiring pattern 7 to surround a periphery of the fuse 5 when viewed from above. A silicon surface insulating film 9 is formed on a source of the silicon wiring pattern 7 at a part crossing the silicon guard ring 11. The silicon wiring pattern 7 and silicon guard ring 11 are insulated from each other by the silicon surface insulating film 9. On the silicon guard ring 11, annular guard rings 17, 19, 25 and 27 are formed of metal materials to surround the periphery of the fuse 5 when viewed from above. COPYRIGHT: (C)2011,JPO&INPIT |
