RESIN MOLD FOR IMPRINTING AND METHOD FOR PRODUCING SAME

摘要

Disclosed is a resin mold for imprinting, which is free from transfer defects, has excellent releasability from a resin to be imprinted, and is not damaged by the imprinting procedure. The resin mold for imprinting is characterized by comprising a resin layer that has a recessed and projected pattern on a surface, an inorganic material layer that is formed with a uniform thickness on at least the surface of the resin layer having the recessed and projected pattern, and a releasing agent layer that is formed with a uniform thickness on at least a surface of the inorganic material layer, said surface having a recessed and projected pattern.