发明名称 ROLLER FOR WIRE SAW
摘要 PROBLEM TO BE SOLVED: To provide a roller for a wire saw having a groove allowing reuse of the roller, while suppressing groove skipping of a wire. SOLUTION: This roller for the wire saw has a plurality of peripheral direction grooves formed in a peripheral direction. In the roller, an angle formed by a peripheral surface of the roller and a groove wall of the peripheral direction groove is 90°, as viewed from a plane including a rotation axis of the roller, and a depth of the peripheral direction groove is 0.83 to 3 times as large as a groove width of the peripheral direction groove. In this case, it is desirable that the peripheral direction groove has a cross section of a U-shape. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011025371(A) 申请公布日期 2011.02.10
申请号 JP20090174375 申请日期 2009.07.27
申请人 SUMCO CORP 发明人 ETO YOSHIHIRO;NOGUCHI HIROSHI
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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